Hanson also made the council aware of an immediate need for a new chlorine gas meter at the well house. The current meter is ...
James has been writing about technology for years but has loved it since the early 90s. While his main areas of expertise are maker tools -- 3D printers, vinyl cutters, paper printers, and laser ...
Abstract: We studied a multilayer perceptron model to predict the etch rates of SiO2 and Si3N4 thin films in CF4 plasma using data obtained from a voltage–current (VI) sensor and an optical emission ...
Modeling the Charging Effect on the Twisting Defects During High Aspect Ratio Etching of Dielectrics
Abstract: In high-aspect-ratio (HAR) plasma etching of dielectrics, random twisting is frequently observed. The charging effect is considered a potential factor influencing this twisting. We develop a ...
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